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Development of the Diagnostic Complex for the Analysis of Thermal Degradation of Semiconductor Structures

Skvortsov, A.A., Koryachko, M.V., Chortov, V.P., Skvortsov, P.A.

Abstract. The present work was aimed at development of a diagnostic complex for studying the thermal degradation of metallization systems of semiconductor structures. The method consists of decoding the oscillogram U(t) of the test structures during the passage through them of current pulses of different shape. The proposed method allows to detect the initial stages of melting in the metal-semiconductor systems.

Keywords: semiconductor structure, metallization systems and contacts, thermal degradation, diagnostic complex

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