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Development of the Diagnostic Complex for the Analysis of Thermal Degradation of Semiconductor Structures

Skvortsov, A.A., Koryachko, M.V., Chortov, V.P., Skvortsov, P.A.

Abstract. The present work was aimed at development of a diagnostic complex for studying the thermal degradation of metallization systems of semiconductor structures. The method consists of decoding the oscillogram U(t) of the test structures during the passage through them of current pulses of different shape. The proposed method allows to detect the initial stages of melting in the metal-semiconductor systems.

Keywords: semiconductor structure, metallization systems and contacts, thermal degradation, diagnostic complex

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November 15, 2017

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November 17, 2017

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November 22, 2017

Plenary session

November 23–24, 2017

Work of sessions

Scientific conferences Kalashnikov Izhevsk State Technical University

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