English | Русcкий | Log in


IEET-2015

Development of the Diagnostic Complex for the Analysis of Thermal Degradation of Semiconductor Structures

Skvortsov, A.A., Koryachko, M.V., Chortov, V.P., Skvortsov, P.A.

Abstract. The present work was aimed at development of a diagnostic complex for studying the thermal degradation of metallization systems of semiconductor structures. The method consists of decoding the oscillogram U(t) of the test structures during the passage through them of current pulses of different shape. The proposed method allows to detect the initial stages of melting in the metal-semiconductor systems.

Keywords: semiconductor structure, metallization systems and contacts, thermal degradation, diagnostic complex


Full Text (PDF)

Полный текст (PDF)

< IEET-2015

< IEET-2015

Timeline

Registration and paper submission:

till June 25, 2018

Paper review:

till July 30, 2018

Participation acceptance:

till August 6, 2018

The Conference

December 12–14, 2018

Scientific conferences Kalashnikov Izhevsk State Technical University
 
 

© Kalashnikov Izhevsk State Technical University, 2018

All rights reserved

© ФГБОУ ВО «ИжГТУ имени М.Т. Калашникова», 2018

Все права защищены